Measurements of the absolute values of the radiation intensity in the wavelength range of 6.6-32 nm of stainless steel targets with pulsed laser excitation
Garakhin S. A.1, Zabrodin I. G. 1, Zuev S. Yu. 1, Lopatin A. Ya. 1, Nechay A. N. 1, Pestov A. E. 1, Perekalov A. A. 1, Pleshkov R. S. 1, Polkovnikov V. N. 1, Salashchenko N. N. 1, Smertin R. M. 1, Tsybin N. N. 1, Chkhalo N. I. 1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: garahins@ipmras.ru
The paper presents experimental data on the absolute values of the radiation intensity in the wavelength range of 6.6-32 nm for a stainless steel target excited by a Nd: YAG laser with parameters λ=1064 nm, Epulse=0.45 J, tau=4 ns, ν=10 Hz. The results are of interest for various applications using laboratory laser-plasma sources of soft X-ray and extreme ultraviolet radiation. Keywords: extreme ultraviolet radiation, emission spectrum, laser spark, multilayer X-ray mirror.
- E. Gullikson, J.H. Underwood, P.C. Batson, V. Nikitin. J. X-Ray Sci. Technol., 3 (4), 283 (1992). DOI: 10.3233/XST-1992-3402
- L. van Loyen, T. Boettger, S. Braun, H. Mai, A. Leson, F. Scholze, J. Tuemmler, G. Ulm, H. Legall, P.V. Nickles, W. Sandner, H. Stiel, C.E. Rempel, M. Schulze, J. Brutscher, F. Macco, S. Muellender. Proc. SPIE, 5038 (12), (2003). DOI: 10.1117/12.485042
- A. Miyake, T. Miyachi, M. Amemiya, T. Hasegawa, N. Ogushi, T. Yamamoto, F. Masaki, Y. Watanabe. Proc. SPIE, 5037, 647 (2003). DOI: 10.1117/12.484969
- H. Wang, X. Wang, Bo Chen, Y. Wang, S. Mao, S. Ren, P. Zhou, Y. Liu, T. Huo, H. Zhou. Optik, 204, 164213 (2020). DOI: 10.1016/j.ijleo.2020.164213
- F. Scholze, T. Bottger, H. Enkisch, C. Laubis, L.V. Loyen, F. Macco, S. Schadlich, Meas. Sci. Technol., 18, 126 (2007). DOI: 10.1088/0957-0233/18/1/015
- D.B. Abramenko, P.S. Antsiferov, L.A. Dorokhin, V.V. Medvedev, Yu.V. Sidelnikov, N.I. Chkhalo, V.N. Polkovnikov. Opt. Lett., 44 (20), 4949 (2019). DOI: 10.1364/OL.44.004949
- S.A. Garakhin, I.G. Zabrodin, S.Yu. Zuev, I.A. Kas?kov, A.Ya. Lopatin, A.N. Nechay, V.N. Polkovnikov, N.N. Salashchenko, N.N. Tsybin, N.I. Chkhalo, M.V. Svechnikov. Kvant. elektron., 47 (4), 385 (2017). DOI: 10.1070/QEL16300
- E.A. Vishnyakov, K.N. Mednikov, A.A. Pertsov, E.N. Ragozin, A.A. Reva, A.S. Ul'yanov, S.V. Shestov. Quant. Electron., 39 (5), 474 (2009). DOI: 10.1070/QE2009v039n05ABEH013902
- E.N. Ragozin, K.N. Mednikov, A.A. Pertsov, A.S. Pirozhkov, A.A. Reva, S.V. Shestov, A.S. Ul'yanov, E.A. Vishnyakov. Proc. SPIE, 7360, 73600N (2009). DOI: 10.1117/12.820750
- E.A. Vishnyakov, I.A. Kopylets, V.V. Kondratenko, A.O. Kolesnikov, A.S. Pirozhkov, E.N. Ragozin, A.N. Shatokhin. Quant. Electron., 48 (3), 189 (2018). DOI: 10.1070/QEL16574
- V.E. Levashov, K.N. Mednikov, A.S. Pirozhkov, E.N. Ragozin, I.Yu. Tolstikhina. Quant. Electron., 37 (11), 1060 (2007). DOI: 10.1070/QE2007v037n11ABEH013608
- I.L. Beigman, E.A. Vishnyakov, M.S. Luginin, E.N. Ragozin, I.Yu. Tolstikhina. Quant. Electron., 40 (6), 545 (2010). DOI: 10.1070/QE2010v040n06ABEH014313
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidelnikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin. Phys. Usp., 62, 304 (2019). DOI: 10.3367/UFNe.2018.06.038447
- I. Fomenkov, D. Brandt, A. Ershov, A. Schafgans, Y. Tao, G. Vaschenko, S. Rokitski, M. Kats, M. Vargas, M. Purvis, R. Rafac, B. La Fontaine, S. De Dea, A. La Forge, J. Stewart, S. Chang, M. Graham, D. Riggs, T. Taylor, M. Abraham, D. Brown. Adv. Opt. Technol., 6, 173 (2017). DOI: 10.1515/aot-2017-0029
- D.T. Elg, J.R. Sporre, D. Curreli, I.A. Shchelkanov, D.N. Ruzic, K.R. Umstadter. J. Micro Nanolithogr., MEMS MOEMS, 14, 013506 (2015). DOI: 10.1117/1.JMM.14.1.013506
- D. Bleiner, T. Lippert. J. Appl. Phys., 106, 123301 (2009). DOI: 10.1063/1.3271142
- E.A. Vishnyakov, A.V. Shcherbakov, A.A. Pertsov, V.N. Polkovnikov, A.E. Pestov, D.E. Pariev, N.I. Chkhalo. Proc. SPIE, 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V, 102350W (2017). DOI: 10.1117/12.2264814
- S.S. Churilov, R.R. Kildiyarova, A.N. Ryabtsev, S.V. Sadovsky. Phys. Scr., 80 (4), 045303 (2009). DOI: 10.1088/0031-8949/80/04/045303
- T. Otsuka, D. Kilbane, J. White, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, G. O'Sullivan. Appl. Phys. Lett., 97, 111503 (2010). DOI: 10.1063/1.3490704
- D.B. Abramenko, V.S. Bushuev, R.R. Gayazov, V.M. Krivtcun, M.V. Spiridonov, A.M. Chekmarev, O.F. Yakushev, K.N. Koshelev. Proc. 17 Int. Symp. Nanophysics \& Nanoelectronics, 1, 261 (2013)
- T. Otsuka, B. Li, C. O'Gorman, T. Cummins, D. Kilbane, T. Higashiguchi, N. Yugami, W. Jiang, A. Endo, P. Dunne, G. O'Sullivan, Proc. SPIE, 8322, 832214 (2012)
- S.A. Garakhin, N.I. Chkhalo, I.A. Kas'kov, A.Ya. Lopatin, I.V. Malyshev, A.N. Nechay, A.E. Pestov, V.N. Polkovnikov, N.N. Salashchenko, M.V. Svechnikov, N.N. Tsybin, I.G. Zabrodin, S.Yu. Zuev. Rev. Sci. Instrum., 91 (6), 063103 (2020). DOI: 10.1063/1.5144489
- A.O. Kolesnikov, E.A. Vishnyakov, E.N. Ragozin, A.N. Shatokhin. Quant. Electron., 50 (10), 967 (2020). DOI: 10.1070/QEL17350
- A.N. Nechay, A.A. Perekalov, N.N. Salashchenko, N.I. Chkhalo. Opt. i spektr., 129 (2), 2021. DOI: https://ojs.ioffe.ru/index.php/os/article/view/1449
- V.N. Polkovnikov, N.N. Salashchenko, M.V. Svechnikov, N.I. Chkhalo. Physics-Uspekhi, 63 (1), 83--95 (2020). DOI: 10.3367/UFNe.2019.05.038623
- N.I. Chkhalo, D.E. Pariev, V.N. Polkovnikov, N.N. Salashchenko, R.A. Shaposhnikov, I.L. Stroulea, M.V. Svechnikov, Yu.A. Vainer, S.Yu. Zuev. Thin Solid Films, 631, 106 (2017). DOI: 10.1016/j.tsf.2017.04.020
- N.I. Chkhalo, M.N. Drozdov, E.B. Kluenkov, S.V. Kuzin, A.Ya. Lopatin, V.I. Luchin, N.N. Salashchenko, N.N. Tsybin, S.Yu. Zuev. Appl. Opt., 55 (17), 4683 (2016). DOI: 10.1364/AO.55.004683
- N.I. Chkhalo, S.V. Kuzin, A.Ya. Lopatin, V.I. Luchin, N.N. Salashchenko, S.Yu. Zuev, N.N. Tsybin. Thin Solid Films, 653, 359 (2018). DOI: 10.1016/j.tsf.2018.03.051
- M.S. Bibishkin, D.P. Chekhonadskih, N.I. Chkhalo, E.B. Kluyenkov, A.E. Pestov, N.N. Salashchenko, L.A. Shmaenok, I.G. Zabrodin, S.Yu. Zuev. Proc. SPIE, 5401, 8 (2004). DOI: 10.1117/12.556949
- M. Svechnikov, D. Pariev, A. Nechay, N. Salashchenko, N. Chkhalo, Y. Vainer, D. Gaman. J. Appl. Cryst., 50, 1428 (2017). DOI: 10.1107/S1600576717012286
- P.N. Aruev, M.M. Barysheva, B.Ya. Ber, N.V. Zabrodskaya, V.V. Zabrodskii, A.Ya. Lopatin, A.E. Pestov, M.V. Petrenko, V.N. Polkovnikov, N.N. Salashchenko, V.L. Sukhanov, N.I. Chkhalo. Quant. Electron., 42 (10), 943 (2012). DOI: 10.1070/QE2012v042n10ABEH014901
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