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Reduction of misfit dislocation density in metamorphic heterostructures by design optimization of the buffer layer with non-linear graded composition profile
Chernov M. Yu.
1, Solov’ev V. A.
1, Ivanov S. V.
1
1Ioffe Institute, St. Petersburg, Russia
Email: chernov@beam.ioffe.ru, vasol@beam.ioffe.ru, ivan@beam.ioffe.ru
Equilibrium distributions of misfit dislocation density along the growth direction of metamorphic buffer layers InxAl1-xAs/GaAs with maximum In content xmax≥0.77 and different non-linear graded composition profiles x propto z1/n are calculated. The effect of the initial In composition (n=2) of InxAl1-xAs buffer layer with convex-graded (xmin) composition profile on misfit dislocation density as well as amount of residual stresses at its top part is considered. Using computational approach, it was shown that a dislocation-free region is formed under thin tensile-strained GaAs layer (1-10 nm) inserted into InAlAs metamorphic buffer layer, which agrees with experimental data obtained early by transmission electron microscopy. Novel non-linear graded composition profile of metamorphic buffer layer has been proposed, which results in twice reduction of misfit dislocation density as compared to the convex-graded one. In addition, equilibrium distributions of misfit dislocation density in the HEMT heterostructures with two-dimensional electron channel InxAl1-xAs, which are based on In0.75Ga0.25As/In0.75Al0.25As metamorphic buffer layer of various designs, are calculated. The values of inverse steps (Delta), representing the difference between the maximum In content of InxAl1-xAs (xmax) and In content of In0.75Al0.25As virtual substrate, at which relaxation of the elastic strains in 2D channel In0.75Ga0.25As/In0.75Al0.25As doesn't occur, are calculated for metamorphic buffer layers InxAl1-xAs with convex-graded and optimized non-linear graded composition profiles. Keywords: metamorphic heterostructures, metamorphic buffer layer, misfit dislocations, elastic stresses, In(Ga,Al)As/GaAs.
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