Shandrikov M.V.
1, Oks E.M.
1,2, Oskirko V.O.
1, Cherkasov A.A.
11Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences, Tomsk, Russia
2Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia
Email: shandrikov@opee.hcei.tsc.ru, oks@opee.hcei.tsc.ru, oskirkovo@gmail.com, cherkasov@opee.hcei.tsc.ru
A stable mode of a gasless (vacuum) magnetron discharge with a cold planar cathode-target at a residual pressure as low as 4· 10-3 Pa and a discharge current of 8-12 A (120-200 mA/cm2) is realized. The results of studies of mass-to-charge ion composition are presented, as well as a comparison of main discharge parameters and a deposition rate in gaseous and vacuum modes. Keywords: magnetron, vacuum regime, ion composition, deposition rate.
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