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The electrical resistance of laser-induced graphene synthesized by a continuous-wave CO2-laser
Russian version
Mikheev K. G. 1, Zonov R. G. 1, Chuchkalov N. V.1, Mikheev G. M. 1
1Udmurt Federal Research Center, Ural Branch Russian Academy of Sciences, Izhevsk, Russia
Email: k.mikheev@udman.ru, znv@udman.ru, chuchkalovkolya@gmail.com, mikheev@udman.ru
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Laser-Induced Graphene (LIG) is a promising new material for widespread applications in electronics and medicine. This study presents experimental results on measuring its specific conductivity (σ), sheet resistance (Rs), as well as contact resistance (Rc) and specific contact resistance (rhoc) of a copper electrode with the LIG film structure synthesized on the surface of a polyimide film using the method of its near-surface layer pyrolysis through line-by-line scanning of a focused beam of cw carbon dioxide laser. It is established that the synthesized LIG film structure exhibits anisotropy in electrical resistance, attributed to the line-by-line scanning. It is demonstrated that σ, Rs, Rc, and rhoc significantly depend on the fluence (F) of the incident laser radiation. Measured values of σ, Rs, and rhoc varied in the ranges of 7.7/10 S/cm, 26/49 Ω/sq, and 9/43 Ω·mm2, respectively, with an increase in F from 31 to 137 J/cm2. Keywords: sheet resistance, specific conductivity, contact resistance, specific contact resistance, electrical anisotropy.
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