The effect of heat treatment on the physical and mechanical properties of thin-film membrane-type Al structures of various shapes
Djuzhev N.A. 1, Gusev E.E.
1, Kushnarev I.V.1, Bespavol V.A. 1
1National Research University of Electronic Technology, Zelenograd, Moscow, Russia
Email: dyuzhev@ckp-miet.ru, bubbledouble@mail.ru, cushnarev.ivan@yandex.ru, rector@miet.ru
An approach to modifying mechanical properties through the processes of thermal recrystallization of thin-film aluminum structures made in the form of square, pentagonal and circular membranes fabricated by magnetron deposition has been implemented and explained for the first time. The experiment was performed according to the planar silicon technology. Modification of mechanical properties was revealed after heat treatment in vacuum at 450oC for 1 h (for example, critical rupture pressure of a circular membrane decreased from 4.9 to 4.0 atm, average variation in the critical rupture pressure decreased from ± 1.5 to ± 0.9 atm, biaxial modulus of elasticity decreased by 24 GPa); the variations were induced by changes in the material structural properties (grain size increased almost 2 times, roughness increased from 76± 4 to 4480± 90 nm). Additional heat treatment allowed creation of more reliable Al-membranes. Keywords: mechanical properties, grain size, thin films, membranes.
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