Discharge of heavy noble gases induced by pulsed gyrotron radiation with 1 THz frequency
Veselov A. P.1, Sidorov A. V.1, Kalynov Yu. K.1, Vodopyanov A. V.1
1Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: veselov@ipfran.ru, alexsv@ipfran.ru, kalynov@ipfran.ru, avod@ipfran.ru

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In this work, gas discharge ignited by girotron radiation with frequency 1 THz was carried out. Breakdown curves were calculated both for selfignited and initiated discharges. There was shown that in a case of breakdown by the pulse radiation with duration longer than several microseconds electric field threshold is the same as in a case of continuous wave breakdown. Also, the possibility of using a terahertz gyrotron as a radiation source for discharge in gas targets on installations for extreme ultraviolet photolithography was assessed. Keywords: girotron, terahertz breakdown, extreme ultraviolet lithography.
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