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Dispersion elements for X-ray mirror spectrometer on a range of 7-30 nm
Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7-30 nm have been calculated and synthesized. Three elements are implemented: for the range λ=7-12 nm - multilayer structure Mo/B4C (number of periods N=60, period thickness d=6.5 nm); for the range λ=11-18 nm - Mo/Be (N=50; d=9.83 nm) and for the range λ=17-30 nm -Be/Si/Al (N=40; d=18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15-1.0 nm. Keywords: SXR and EUV radiation, multilayer X-ray mirrors, laser plasma, spectroscopy. DOI: 10.61011/TP.2023.07.56641.60-23
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