Silicon differential photodetectors. Technology, characteristics, application
V.V. Gavrushko1, A.S. Ionov1, O.R. Kadriev1, V.A. Lastkin1
1Yaroslav-the-Wise Novgorod State University, Veliky Novgorod, Russia
Email: Valery.Gavrushko@novsu.ru
A silicon-based photodetector containing two identical n^+-p-photodiodes is described. One of the photodiodes had a wide spectral response with high sensitivity in the ultraviolet region. The sensitivity of the second was reduced in the short-wavelength part of the spectrum by creating additional recombination centers in the near-surface region by implanting As ions. The spectral sensitivity of the differential signal obtained by subtracting photocurrents had a pronounced short-wavelength characteristic. The long-wavelength limit of the spectral range in terms of the λ0.5 level, depending on the doping dose, was in the range of 0.37-0.47 μm. The sensitivity maximum corresponded to λmax=0.32-0.37 μm. The electrical and noise characteristics of the photodetector are given. The possibility of using differential photodetectors as two-color ones is shown. Keywords: Photodiode, implantation, differential signal, ultraviolet, two-spectrum photodetector.
- A.M. Prokhorov (Editor-in-Chief) Fizicheskiy entsiklopedicheskiy slovar /Gl. red. A.M. Prokhorov (Sovetskaya entsiklopediya, M., 1983) (in Russian)
- J. Fryden. Modern sensors. Handbook (Technosphere, M., 2005)
- N.T. Gurin, S.G. Novikov, I.V. Korneev, A.A. Shtanko, V.A. Rodionov. Pisma v ZhTF 37, (6), 57 (2011). (in Russian)
- M.V. Kitaeva, A.V. Yurchenko, A.V. Ohorzina, A.V. Skorokhodov. Polzunovskij vestnik, 3/1, 196 (2011) (in Russian)
- A.M. Filachev, V.P. Ponomarenko, I.I. Taubkin. Prikladnaya fizika, 2, 102 (2003). (in Russian)
- M.L. Baranochnikov. Priyemniki i detektory izlucheniy.. Spravochnik (DMK Press, M. 2012)
- I.D. Anisimov, I.M. Vikulin, F.A. Zaitov, Sh.D. Kurmashev. Poluprovodnikovyye fotopriyemniki: Ul'trafioletovyy, vidimyy i blizhniy IK diapazony spektra (Radio i svyaz', M., 1984)
- R.J. Kies (ed.). Fotopriyemniki vidimogo i IK diapazonov. Transl. from English. (Radio i svyaz, M., 1985) (in Russian)
- A.M. Filachev, I.I. Taubkin, M.A. Trishenkov. Sovremennoye sostoyaniye i magistral'nyye napravleniya razvitiya tverdotel'noy fotoelektroniki (Fizmatkniga, M., 2010) (in Russian)
- A.V. Voytsekhovsky, N.A. Kulchitsky, A.A. Melnikov, S.N. Nesmelov, S.M. Dzyadukh. Nano i mikrosistemnaya tekhnika,143 (6), 30 (2012) (in Russian)
- Y.I. Belousov, E.S. Postnikov. Infrakrasnaya fotonika. Chast' II Osobennosti registratsii i analiza teplovykh poley. Manual (ITMO University, SPb, 2019)
- R. Hayman. Svetofiltry. Transl. from English. (In Russian) (Mir, M., 1988) (in Russian)
- E. Ritter. Fizika tonkikh plenok, 8, 7 (1978)
- G.V. Rosenberg. Optika tonkosloynykh pokrytiy (Nauka, M., 1991)
- Electronic resource 0AO "LLS". Available at: info@lenlasers.ru
- Y.A. Goltberg, B.V. Tsarenkov. ZhTF, 66 (8), 195 (1996) (in Russian)
- Y.A. Glebov, N.Y. Zvereva, Y.A. Kazarova, O.G. Revzina, L.S. Shenderovich. Prikladnaya fizika, 3, 84 (2007). (in Russian)
- Sh.A. Furman. Tonkosloinye opticheskie pokrytiya (Mashinostroenie, L., 1977) (in Russian)
- G.Ya. Kolodny, E.A. Levchuk, Y.D. Poryadin, P.P. Yakovlev. Elektron. Prom-st., 5, 93 (1981). (in Russian)
- V.V. Gavrushko, A.S. Ionov, V.A. Lastkin. Nauka, Tekhnologiya, Biznes, 100 (2), 72 (2010). (in Russian)
- US Patent N 7196311, H01L 27/15 dated 11.08.2005
- BY Patent N 8532 U1, H01L 27/15 dated 30.08.2012
- Patent RU N 156627 U, H01L 31/068 dated 05.05.2015
- V.V. Gavrushko, A.S. Ionov, O.R. Kadriev, V.A. Lastkin. ZhTF, 87 (2), 310 (2017). (in Russian)
- R. Korde, L.R. Canfield, B. Wallis. Proc. SPIE, 932, 153 (1988)
- V.V. Gavrushko, A.S. Ionov, V.A. Lastkin. Datchiki i sistemy, 121 (6), 49 (2009)
- V.V. Gavrushko, V.A. Lastkin. Vestnik of Novgorodskogo gos. un-ta, 65, 17 (2011). (In Russian)
- V.V. Gavrushko, A.S. Ionov, V.A. Lastkin. Tez. dokl. IV Vserossiyskoy konferentsii Fizicheskiye i fiziko-khimicheskiye osnovy ionnoy implantatsii" (Novosibirsk, Russia, 2012), p. 37
- A.P. Gorshkov, I.A. Karpovich, E.D. Pavlova, N.S. Volkova. FTP, 46 (12), 1542 (2012) (in Russian)
- S. Namba. Technology of Ion Doping. Per. s Japanese (Sov. Radio, M., 1974)
- V.S. Vavilov, A.R. Chelyadinskiy. UFN, 165 (3), 347 (1995) (in Russian)
- J.F. Ziegler, J.P. Biersack, M.D. Ziegler. Nucl. Instrum. Methods Phys. Res. B, 268, 1818 (2010)
- V.V. Gavrushko, A.S. Ionov, V.A. Lastkin. Patent na poleznuyu model' kremniyevyy fotopriyemnik s zadavayemoy spektral'noy kharakteristikoy(N 166199 27.11.2016)
- V.V. Gavrushko, A.S. Ionov, O.R. Kadriev. Mater. Sci. Eng., 441 (1), 1 (2018)
- V.V. Gavrushko, A.S. Ionov, O.R. Kadriev, V.A. Lastkin. J. Phys.: Conf. Series, 2052, 012 (2021)
- V.V. Pasynkov, L.K. Chirkin, A.D. Shinkov. Poluprovodnikovye pribory (M., Vyssh. shk., 1981) (Russian)
- V.I. Stafeev. FTT, 3, (1), 185 (1961). (in Russian)
- V.V. Gavrushko, O.R. Kadriev, V.A. Lastkin, A.A. Sapozhnikov. Vestnik of Novgorodskogo gos. un-ta, 104 (6), 17 (2017). (In Russian)
- GOST 21934-83 Priyemniki izlucheniya poluprovodnikovyye fotoelektricheskiye i fotopriyemnyye ustroystva.
- Patent RU N 1763331 U1, H01L 31/068 dated 02.05.2017
- V.V. Gavrushko, A.S. Ionov, O.R. Kadriev, V.A. Lastkin. Vestnik of Novgorodskogo gos. un-ta, 107, 4 (2018). (In Russian)
- V.V. Zabrodsky, P.N. Aruev, V.P. Belik, B.Ya. Ber, D.Yu. Kazantsev, M.V. Drozdova, N.V. Zabrodskaya, M.S. Lazeeva, A.D. Nikolenko, V.L. Sukhanov, V.V. Philimonov, E.V. Sherstnev. FTP, 47, (2), 178 (2013). (in Russian)
- A.V. Klyuev, E.I. Shmelev, A.V. Yakimov. Izvestiya Vuzov. Radiofizika, LVII (12), 995 (2014). (in Russian)
- S. Zi. Fizika poluprovodnikovyk priborov (M., Mir, 1984) v. 2. (in Russian)
- V.V. Gavrushko, A.S. Ionov, A.A. Sapozhnikov. Vestnik of Novgorodskogo gos. un-ta, 109 (3), 13 (2018). (In Russian)
- M.A. Trishenkov. Fotopriyemnyye ustroystva i PZS. Obnaruzheniye slabykh opticheskikh signalov (Radio i svyaz'., M., 1992)
- V.I. Sankin, V.P. Chelibanov. Phys. Stat. Sol. A, 185 (1), 153 (2001)
- I.K. Kikoin, (red.) Tablitsa fizicheskikh velichin. Spravochnik (Atomizdat, M., 1976) (in Russian)
- V.A. Kaptsov, V.N. Deinego. Health Risk Analysis, 13 (1), 15 (2016)
- A. V. Vinogradova, M. R. Sidorova. Expertiza. Kachestvo. Tekhnologii. Sb. mater. Mezhdunar. scientific-practical conf. (Novosibirsk, 2020), p. 229 - 233
- V.V. Gavrushko, O.R. Kadriev. Vestnik of Novgorod State University named after Yaroslav the Wise, 2 (114), 4 (2019)
- V.N. Krasnoshchekova, N.V. Ilyukhin, S.S. Romanova, L.H. Akhmetova. Gigiyena truda i meditsinskaya ekologiya, 3, 98 (2015).
Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.
Дата начала обработки статистических данных - 27 января 2016 г.