Thin films of solid-phase amorphous electrolyte made from nitrogen-doped lithium metaphosphate with an increased ionic conductivity
Kamenetskikh A. S.
1,2, Gavrilov N. V.
1, Tretnikov P. V.
1, Ershov A. A.
1, Pershina S. V.
31Institute of Electrophysics of the Ural Branch of the Russian Academy of Sciences, Yekaterinburg, Russia
2Ural Federal University after the first President of Russia B.N. Yeltsin, Yekaterinburg, Russia
3Institute of High-Temperature Electrochemistry, Ural Branch, Russian Academy of Sciences, Yekaterinburg, Russia
Email: alx@iep.uran.ru, gavrilov@iep.uran.ru, tpetr@iep.uran.ru, ershov@iep.uran.ru, Svpershina_86@mail.ru
Thin (1 μm) films of amorphous solid electrolyte were synthesized by anodic evaporation of LiPO3 in Ar/N2 plasma of a low-pressure (0.5 Pa) arc and vapor deposition on metal substrates at the rate of 0.5 μm/h under the conditions of a widely adjustable (from 0.1 to 0.9) fraction of free Li in vapor. Ionic conductivity of the films was shown to reach 1.7· 10-5 S/cm at room temperature. Keywords: anodic evaporation, thin films, solid lithium-ion electrolyte.
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