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Home » Technical Physics » Year 2022, issue 13 » Article p. 2141
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Wavefront lens corrector for studying flat surfaces
Russian version
DOI: 10.21883/TP.2022.13.52235.108-21
Toropov M. N.1, Akhsakhalyan А. А.1, Malyshev I. V.1, Mikhailenko M. S.1, Pestov A. E.1, Salashchenko N. N.1, Chernyshev A. K.1, Chkhalo N. I.1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: toropov@ipm.sci-nnov.ru
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The method of manufacturing and the results of studies of a lens corrector that converts a spherical diverging front into a plane one and is intended for studying flat surfaces as part of an interferometer with a diffraction comparison wave is described. A feature of the corrector is the use of an aspherical convex surface with a maximum deviation of ~ 200 μm from the nearest sphere. The first experimental results are presented, indicating the prospects for using ion-beam processing to improve the quality of the wavefront. After the procedure of ion-beam processing, the aberrations over the entire aperture of the corrector decreased by more than 4 times and amounted to the parameter of the height difference PV = 207 nm (~ λ/3) and (RMS) = 19.2 nm (~ λ/33). On an area with a diameter of 80%, the aberrations fell to the nanometer level: PV = 65 nm (~ λ/10) and RMS = 8.3 nm (~ λ/76). Keywords: lens corrector, interferometry, aspherical lens, ion-beam processing.
  1. M.A. Okatov, E.A. Antonov, A. Baygozhin, M.I. Bakaev, I.V. Belova, I.Ya. Bubis, V.A. Veydenbakh, N.M. Vorontsova, S.V. Danilov, N.Yu. Dudkina, I.I. Dukhopel, S.M. Kuznetsov, Z.A. Kukleva, G.V. Listratova, B.I. Lodygin, Yu.K. Lysyany, S.V. Lyubarsky, A.V. Mikhaylov, V.Ya. Nazarova, E.I. Ponfilenok, B.I. Petrov, G.T. Petrovsky, V.P. Poveshchenko, G.D. Pridatko, S.M. Prokhorchik, V.N. Savushkin, R.S. Sokolova, N.V. Suykovskaya, L.V. Tarnovskaya, I.D. Torbin, L.A. Cherezova, B.A. Chunin, A.V. Shatilov, E.I. Shepurev, Z.V. Shirokshina, V.Kh. Yagmurov. Spravochnik tekhnologa-optika, pod red. M.A. Okatov. (Politekhnika, SPb, 2004), s. 679 (in Russian)
  2. G.E. Sommargren. Laser Focus World, 8, 61 (1996)
  3. K. Otaki, K. Ota, I. Nishiyama, T. Yamamoto, Y. Fukuda, S. Okazaki. J. Vac. Sci. Technol. B, 20 (6), 2449 (2002). https://doi.org/10.1116/1.1526605
  4. D. Malacara, ed. Optical shop testing. (2 ed.) (John Wiley\&Sons, Inc., N Y., 1992) ISBN 0-471-52232-5,
  5. U. Dinger, F. Eisert, H. Lasser, M. Mayer, A. Seifert, G. Seitz, S. Stacklies, F.-J. Stickel, M. Weiser. Proc. SPIE, 4146, 35 (2000). DOI: 10.1117/12.406674
  6. J.M. Sasian. Opt. Eng., 27 (12), 1051 (1988). DOI: 10.1117/12.7978676
  7. J.H. Burge. Proc. SPIE, 2576, 258 (1995)
  8. C. Zhao, J.H. Burge., Proc. SPIE, 6723, 67230L (2007). DOI: 10.1117/12.782920
  9. N.B. Voznesensky, E.V. Gavrilov, A.P. Zhevlakov, V.K. Kirillovskie, P.V. Orlov. Tech. Phys., 52 (2), 271 (2007). DOI: 10.1134/S106378420702020X
  10. N.I. Chkhalo, I.V. Malyshev, A.E. Pestov, V.N. Polkovnikov, N.N. Salashchenko, M.N. Toropov, A.A. Soloviev. Appl. Opt., 55 (3), 619 (2016). DOI: 10.1364/AO.55.000619
  11. A.A. Akhsakhalyan, D.A. Gavrilin, I.V. Malyshev, N.N. Salashchenko, M.N. Toropov, B.A. Ulasevich, N.N. Tsybin, N.I. Chkhalo. Tech. Phys., 64 (11), 1698 (2019)
  12. M.N. Toropov, N.I. Chkhalo, N.N. Salashchenko, I.V. Malyshev, B.A. Ulasevich, D.A. Gavrilin, A.A. Akhsakhalyan. "INTERFEROMETR". Zayavka 201918818. Prioritet 18.06.20193. Zaregistrirovano v Gosreestre 19.02.2020. N 271486. (in Russian)
  13. N.I. Chkhalo, I.V. Malyshev, A.E. Pestov, V.N. Polkovnikov, N.N. Salashchenko, M.N. Toropov. Physics-Uspekhi, 63 (1), 67 (2020). DOI: 10.3367/UFNe.2019.05.038601
  14. M.N. Toropov, A.A. Akhsakhalyan, M.V. Zorina, N.N. Salashchenko, N.I. Chkhalo, Yu. M. Tokunov. Tech. Phys., 65 (11), 1873 (2020)
  15. M. Born, E. Volf, Osnovy optiki (Nauka, M., 1973) (in Russian)
  16. N.I. Chkhalo, I.A. Kaskov, I.V. Malyshev, M.S. Mikhaylenko, A.E. Pestov, V.N. Polkovnikov, N.N. Salashchenko, M.N. Toropov, I.G. Zabrodin. Precision Engineer., 48, 338 (2017). DOI: http://dx.doi.org/10.1016/j.precisioneng.2017.01.004
  17. A. Chernyshev, N. Chkhalo, I. Malyshev, M. Mikhailenko, A. Pestov, R. Pleshkov, R. Smertin, M. Svechnikov, M. Toropov. Precision Engineer., 69, 29 (2021). https://doi.org/10.1016/j.precisioneng.2021.01.006

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