Technical Physics Letters
To authors
Volumes and Issues
- 2024
- 2023
- 2022
Determination of the thicknesses and depths of subsurface nanostructures using a scanning electron microscope
Rau E. I.
1, Zaitsev S. V.1, Karaulov V. Yu.1
1Lomonosov Moscow State University, Moscow, Russia
Email: rau@phys.msu.ru, zai336@mail.ru, x3llp1x@gmail.ru
The calculated ratios of the signal of backscattered electrons for multilayer nanostructures are derived depending on the energy of probing electrons and composition of multicomponent samples. From experimentally measured signals and calculated ratios, not only thicknesses but also, for the first time, depths of occurrence of local microheterogeneities of three-dimensional nanostructures were determined. The studies were carried out by a non-destructive method of detecting backscattered electrons in a scanning electron microscope. Keywords: multilayer nanostructures, scanning electron microscopy.
- L. Reimer, Scanning electron microscopy physics of image formation and microanalysis, 2nd ed. (Springer, Berlin, 1998)
- H. Niedrig, J. Appl. Phys., 53 (4), R15 (1982). DOI: 10.1063/1.331005
- F. Schlichting, D. Berger, H. Niedrig, Scanning, 21 (3), 197 (1999). DOI: 10.1002/sca.4950210305
- S.Yu. Kupreenko, N.A. Orlikovskii, E.I. Rau, A.M. Tagachenkov, A.A. Tatarintsev, Tech. Phys., 60 (10), 1515 (2015). DOI: 10.1134/S1063784215100205
- V.P. Afanas'ev, P.S. Kaplya, I.A. Kostanovsky, Poverkhnost'. Rentgenovskie, sinkhnotronnye i neytronnye issledovaniya, N 2, 30 (2013). (in Russian)
- E.I. Rau, V.Yu. Karaulov, S.V. Zaitsev, Rev. Sci. Instrum., 90 (2), 023701 (2019). DOI: 10.1063/1.5054746
- V.V. Zabrodsky, S.V. Zaitsev, V.Yu. Karaulov, E.I. Rau, V.A. Smolyar, E.V. Sherstnev, Bull. Russ. Acad. Sci. Phys., 83 (11), 1357 (2019). DOI: 10.3103/S1062873819110273
- H.J. Fitting, J. Electron Spectr. Relat. Phenom., 136 (3), 265 (2004). DOI: 10.1016/j.elspec.2004.04.003
- P.B. De Nee, in Scanning electron microscopy, ed. by O. Johari (SEM., Inc., O'Hare, III, N.Y., 1978), vol. 1, p. 741
- M. Dapor, N. Bazzanella, L. Toniutti, A. Miotello, M. Crivellari, S. Gialanella, Surf. Interface Anal., 45 (2), 677 (2013). DOI: 10.1002/sia.5144
- V.E. Cosslett, R.N. Thomas, Brit. J. Appl. Phys., 15 (8), 883 (1964). DOI: 10.1088/0508-3443/15/8/303
Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.
Дата начала обработки статистических данных - 27 января 2016 г.