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Influence of the upper electrode material on the electrophysical properties of MDM structures based on ferroelectric films

Russian version

DOI: 10.21883/PSS.2023.06.56117.73

Afanasyev M. S.¹, Belorusov D. A.¹, Kiselev D. A.¹, Chucheva G. V.¹

¹Fryazino Branch, Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Fryazino, Moscow oblast, Russia

Email: gvc@ms.ir.rssi.ru

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Abstract
References
Статистика просмотров

Ferroelectric films of the composition Ba_0.8Sr_0.2TiO₃ (BST) were synthesized on platinized silicon substrates by RF sputtering. Top electrodes made of nickel, aluminum, copper and chromium were formed on the grown films by electron beam sputtering. The results of studies of the electrophysical properties of the obtained metal-dielectric-metal (MDM) heterostructures (Me-BST-Pt-Si) are presented. Keywords: ferroelectric BST films, metal-dielectric-metal (MDM) structures, microstructure, electrophysical properties.

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