Influence of the upper electrode material on the electrophysical properties of MDM structures based on ferroelectric films
Afanasyev M. S.1, Belorusov D. A.1, Kiselev D. A.1, Chucheva G. V.1
1Fryazino Branch, Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Fryazino, Moscow oblast, Russia
Email: gvc@ms.ir.rssi.ru
Ferroelectric films of the composition Ba0.8Sr0.2TiO3 (BST) were synthesized on platinized silicon substrates by RF sputtering. Top electrodes made of nickel, aluminum, copper and chromium were formed on the grown films by electron beam sputtering. The results of studies of the electrophysical properties of the obtained metal-dielectric-metal (MDM) heterostructures (Me-BST-Pt-Si) are presented. Keywords: ferroelectric BST films, metal-dielectric-metal (MDM) structures, microstructure, electrophysical properties.
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