Technical Physics Letters
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- 2022
Preferential sputtering of NiTi alloy by atomic and gas cluster ions
Ieshkin A. E.
1, Chernysh V. S.
1, Kireev D. S.
1, Senatulin B. R.
2, Skryleva E. A.
2
1Lomonosov Moscow State University, Moscow, Russia
2National University of Science and Technology MISiS, Moscow, Russia
2National University of Science and Technology MISiS, Moscow, Russia
Email: ieshkin@physics.msu.ru, chernysh@phys.msu.ru
X-ray photoelectron spectroscopy was used to study the evolution of the NiTi alloy surface composition under bombardment with atomic and cluster argon ions. A strong enrichment of the surface with nickel was found for both atomic and cluster ions, which is inconsistent with contemporary understanding of preferential sputtering. Possible reasons for this result are discussed. Keywords: ion sputtering, cluster ions, preferential sputtering, XPS. DOI: 10.61011/TPL.2023.06.56374.19447
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