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Influence of magnetron sputtering modes on properties of protective Ti-Al-Ta-N coatings
Russian version
Derbin A.Yu.1, Shugurov A.R.1, Kuzminov E.D.1, Panin A.V.1
1Institute of Strength Physics and Materials Science of Siberian Branch of Russian Academy of Sciences, Tomsk, Russia
Email: derbinalexei@yandex.ru
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Applying of protective coatings is an effective way to increase the resistance of various parts and components against wear, oxidation and corrosion. In this article a comparative analysis of Ti-Al-Ta-N coatings deposited by high-power impulse magnetron sputtering and direct current magnetron sputtering is carried out. It is shown that the use of the combined sputtering mode can significantly increase the deposition rate. The influence of the deposition modes and the multilayer architecture of these coatings on their mechanical and tribological characteristics, as well as oxidation resistance, is investigated. It is established that optimization of the architecture of the Ti-Al-Ta-N multilayer coatings makes it possible to increase their hardness and wear resistance, but it has almost no effect on their oxidation resistance Keywords: Ti-Al-Ta-N coatings, magnetron sputtering, mechanical properties, oxidation resistance.
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