Вышедшие номера
Radiation effects in Si--Ge quantum size structures (review)
Sobolev N.A.1
1Departamento de Fisica & I3N, Universidade de Aveiro,-193 Aveiro, Portugal
Поступила в редакцию: 17 июля 2012 г.
Выставление онлайн: 20 января 2013 г.

The article is dedicated to the review and analysis of the effects and processes occurring in Si-Ge quantum size semiconductor structures upon particle irradiation including ion implantation. Comparisons to bulk materials are drawn. The reasons of the enhanced radiation hardness of superlattices and quantum dots are elucidated. Some technological applications of the radiation treatment are reviewed.
  1. E.G. Stassinopoulos, J.P. Raymond. Proc. IEEE, 76, 1423 (1988)
  2. D. Kanjilal. Curr. Sci., 80, 1560 (2001)
  3. P.S. Gwozdz, J.S. Koehler. Phys. Rev. B, 6, 4571 (1972)
  4. J. Bourgoin, M. Lannoo. Point defects in semiconductors II, Experimental aspects [Springer Ser. in Sol. St. Sci., v. 35] (Springer, Berlin, Heidelberg, 1983)
  5. F.F. Morehead, B.L. Crowder. Rad. Eff. Def. Solids, 6, 27 (1970)
  6. J.F. Gibbons. Proc. IEEE, 60, 1062 (1972)
  7. S. Takeda, J. Yamasaki. Phys. Rev. Lett., 83, 320 (1999)
  8. J. Yamasaki, S. Takeda, K. Tsuda. Phys. Rev. B, 65, 115 213 (2002)
  9. H. Bernas. In: Radiation Effects in Solids, ed. by K.E. Sickafus et al. (Springer, Dordrecht, 2007) chap. 12, p. 353, and references therein
  10. P. Sigmund. In: Sputtering by Particle Bombardment I, ed. by R. Behrisch (Springer, Berlin, 1981)
  11. J.F. Ziegler, J.P. Biersack, U. Littmark. The Stopping and Range of Ions in Solids (Pergamon, N.Y., 1985); http://www.srim.org/
  12. Available from the Radiation Shielding Information Center, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN, 37831-6362, USA, pdc@epic.epm.ornl.gov
  13. P. Hovington. Scanning, 19, 29 (1997)
  14. Ionizing Radiation Effects in MOS Devices and Circuits, ed. by T.P. Ma, P.V. Dressendorfer (John Wiley, N.Y., 1989)
  15. A.H. Johnston. 4th Intern. Workshop on Rad. Eff. in Semicond. Devices for Space Appl. (Tsukuba, Japan, 2000)
  16. See, e.g.: IEEE Trans. Nucl. Sci.; Proc. Intern. Conf. on Defects in Semicond
  17. C. Weisbuch, J. Nagle. In: Science and Engineering of 1D and 0D Semiconductor Systems, ed. by C.M. Sotomayor-Torres and S.P. Beaumont [NATO ASI Series B124] (Plenum, N.Y., 1990) p. 319
  18. G.M. Dalpian, J.R. Chelikowsky. Phys. Rev. Lett., 96, 226 802 (2006)
  19. D. Turnbull. J. Appl. Phys., 21, 1022 (1950)
  20. M.-H. Du, S.C. Erwin, Al.L. Efros, D.J. Norris. Phys. Rev. Lett., 100, 179 702 (2008)
  21. N.A. Sobolev. In: Physics Chemistry and Application of Nanostrucutres (World Scientific, Singapore, 1997) p. 43
  22. C. Claeys, E. Simoen. Radiation effects in advanced semiconductor materials and devices (Springer Verlag, N.Y., 2002)
  23. H. Ohyama, T. Nagano, K. Takakura, M. Motoki, K. Matsuo, H. Nakamura, M. Sawada, S. Kuboyam, M.B. Gonzalez, E. Simoen, G. Eneman, C. Claeys. Thin. Sol. Films, 518, 2517 (2010)
  24. H. Ohyama, N. Naka, K. Takakura, I. Tsunoda, M.B. Gonzalez, E. Simoen, C. Claeys. Microelectronic Eng., 88, 484 (2011)
  25. H. Ohyama, K. Shigaki, K. Hayama, K. Takakura, M. Yoneoka, Y. Takami, J. Vanhellemont, E. Simoen, C. Claeys. Res. Rep. Kumamoto-NCT, 1, 93 (2009)
  26. G.D. Watkins. IEEE Trans. Nucl. Sci., NS-16, 13 (1969)
  27. G.D. Watkins, J.R. Troxell, A.P. Chatterjee. Inst. Phys. Conf. Ser., 46, 16 (1979)
  28. L.I. Khirunenko, V.I. Shakhovtsov, V.V. Shumov. Fiz. Tekh. Poluprovodn., 32, 132 (1998) [Semiconductors, 32, 120 (1998)]
  29. V.G. Golubev, V.V. Emtsev, P.M. Klinger, G.I. Kropotov, Y.V. Shamartsev. Fiz. Tekh. Poluprovodn., 26, 574 (1992) [Sov. Phys. Semicond., 26, 328 (1992)]
  30. M.S. Saidov, S.L. Lutpullaev, A. Yusupov, I.G. Atabaev, L.I. Khirunenko, N.A. Matchanov, D. Saidov, M.U. Hajiev. Fiz. Tverd. Tela, 49, 1582 (2007) [Phys. Solid State, 49, 1658 (2007)]
  31. L.I. Khirunenko, Yu.V. Pomozov, M.G. Sosnin, M.O. Trypachko, A.V. Duvanskii, N.V. Abrosimov, H. Riemann, S.B. Lastovskii, L.I. Murin, V.P. Markevich, A.R. Peaker. Mater. Sci. Semicond. Processing, 9, 525 (2006)
  32. L. Khirunenko, Yu. Pomozov, M. Sosnin, N. Abrosimov, W. Schroder. Physica B, 308--310, 550 (2001)
  33. L.I. Khirunenko, Yu.V. Pomozov, M.G. Sosnin, A. Duvanskii, V.J.B. Torres, J. Coutinho, R. Junes, P.R. Briddon, N.V. Abrosimov, H. Riemann. Physica B, 401--402, 200 (2007)
  34. S. Hayama, G. Davies, J. Tan, V.P. Markevich, A.R. Peaker, J. Evans-Freeman, K.D. Vernon-Parry, N.V. Abrosimov. Physica B, 340--342, 823 (2003)
  35. J.P. Leitao, A. Carvalho, J. Coutinho, R.N. Pereira, N.M. Santos, A.O. Ankiewicz, N.A. Sobolev, M. Barroso, J. Lundsgaard Hansen, A. Nylandsted Larsen, P.R. Briddon. Phys. Rev. B, 84, 165 211 (2011)
  36. A. Mesli, Vl. Kolkovsky, L. Dobaczewski, A. Nylandsted Larsen, N.V. Abrosimov. Nucl. Instrum. Meth. Phys. Res. B, 253, 154 (2006)
  37. A. Mesli, A. Nylandsted Larsen. J. Phys.: Condens. Matter, 17, S2171 (2005)
  38. V.P. Markevich, A.R. Peaker, L.I. Murin, N.V. Abrosimov. J. Phys.: Condens. Matter, 15, S2835 (2003)
  39. A.R. Peaker, V.P. Markevich. In: Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy, ed. by J.D. Cressler (CRC Taylor \& Francis, 2006) p. 107
  40. H. av Skardi, A.B. Hansen, A. Mesli, A.N. Larsen. Nucl. Instrum. Meth. Phys. Res. B, 186, 195 (2002)
  41. A. Nylandsted Larsen, A. Bro Hansen, A. Mesli. Mater. Sci. Eng. B, 154--155, 85 (2008)
  42. A.V. Voevodova, F.P. Korshunov, N.A. Sobolev, A.A. Stuk. Fiz. Tekh. Polyprovodn., 23, 45 (1989) [Sov. Phys. Semicond., 23, 734 (1989)]
  43. A.V. Voevodova, F.P. Korshunov, N.A. Sobolev, A.A. Stuk. In: Defect Control in Semicond. (Amsterdam, 1990) v. 1, p. 387
  44. N.A. Sobolev, M.H. Nazare. Physica B, 273--274, 271 (1999)
  45. A.O. Ankiewicz, N.A. Sobolev, J.P. Leitao, M.C. Carmo, R.N. Pereira, J. Lundsgaard Hansen, A. Nylandsted Larsen. Nucl. Instrum. Meth. Phys. Res. B, 248, 127 (2006)
  46. N.A. Sobolev, F.P. Korshunov, R. Sauer, K. Thonke, U. Konig, H. Presting. J. Cryst. Growth, 167, 502 (1996)
  47. V.I. Gubskaya, P.V. Kuchinskii, V.M. Lomako. Rad. Eff. Def. Solids, 55, 35 (1981)
  48. E.S. Basova, S.B. Lastovskii, N.A. Sobolev, F.P. Korshunov, U. Konig, H. Presting. Intern.: Topical Problems of Solid-State Electronics and Microelectronics. Proc. 5th All-Russian and Intl. Conf. (Taganrog, TRTU, 1998) p. 71
  49. E.S. Basova, S.B. Lastovskii, N.A. Sobolev, F.P. Korshunov, U. Konig, H. Presting. 8th Intern. Conf. Radiation Physics of Solids" (Sevastopol, 1998)
  50. N.A. Sobolev, E.S. Basova, S.B. Lastovskii, F.P. Korshunov, N.A. Poklonskii, A.I. Syaglo, M.H. Nazare, H. Presting, U. Konig. Abstracts 20th Intern. Conf. Defects Semicond. (Berkeley, USA, 1999) p. 293
  51. N.A. Sobolev, A. Fonseca, J.P. Leitao, M.C. Carmo, H. Presting, H. Kibbel. Phys. Status Solidi C, 0, 1267 (2003)
  52. G. Davies. Phys. Rep., 176, 83 (1989)
  53. R. Sauer. In: Landolt--Bornstein (Springer, Berlin, 1989) v. 22b, P. 338
  54. A. Fonseca, N.A. Sobolev, J.P. Leitao, E. Alves, M.C. Carmo, N.D. Zakharov, P. Werner, A.A. Tonkikh, G.E. Cirlin. J. Luminesc., 121, 417 (2006)
  55. J.P. Leitao, N.A. Sobolev, M.R. Correira, M.C. Carmo, N. Stepina, A. Yakimov, A. Nikiforov, S. Magalhaes, E. Alves. Thin Sol. Films, 517, 303 (2008)
  56. D.J. Eaglesham, J.M. Poate, D.C. Jacobson, M. Cerullo, L.N. Pfeiffer, K. West. Appl. Phys. Lett., 58, 523 (1991)
  57. D.Y.C. Lie, A. Vantomme, F. Eisen, T. Vreeland, Jr., M.-A. Nicolet, T.K. Carns, V. Arbet-Engels, K.L. Wang. J. Appl. Phys., 74, 6039 (1993)
  58. T.E. Haynes, O.W. Holland. Appl. Phys. Lett., 61, 61 (1992)
  59. M. Vos, C. Wu, I.V. Mitchell, T.E. Jackman, J.-M. Baribeau, J. McCaffrey. Appl. Phys. Lett., 58, 951 (1991)
  60. N.A. Sobolev, K. Gartner, U. Kaiser, U. Konig, H. Presting, B. Weber, E. Wendler, W. Wesch. Mater. Sci. Forum, 248--249, 289 (1997)
  61. N.A. Sobolev, U. Kaiser, I.I. Khodos, H. Presting, U. Konig. Mater. Res. Soc. Symp. Proc. (Wareendale, PA, USA, 1999) v. 540, p. 91
  62. N.A. Sobolev, U. Kaiser, I.I. Khodos, H. Presting, U. Konig. Izvestia RAN, Ser. fiz., 63, 1352 (1999) [Bull. Russian Acad. Sci., Physics Ser., 63, 1066 (1999)]
  63. N.A. Sobolev, M.C. Carmo, B. Breeger, E. Wendler, W. Wesch, R. Hey, H.T. Grahn. Intern. Conf. Electronic Mater. and EMRS Spring Meeting (Strasbourg, 2000)
  64. N.A. Sobolev, M.V. Carmo, B. Breeger, E. Wendler, W. Wesch, R. Hey, H.T. Grahn. 15th Intern. Conf. Ion Beam Analysis, IBA-15 (Cairns, 2001)
  65. B. Breeger, E. Wendler, Ch. Schubert, W. Wesch. Nucl. Instrum. Meth. Phys. Res. B, 148, 468 (1999)
  66. M. Bode, A. Ourmazd, J. Cunningham, M. Hong. Phys. Rev. Lett., 67, 843 (1991)
  67. N.A. Sobolev, E.S. Basova, S.B. Lastovskii, F.P. Korshunov, N.A. Poklonskii, A.I. Syaglo, M.H. Nazare, H. Presting, U. Konig. Abstracts 2nd All-Russian Conf. Silicon-2000" (Moscow, 2000) p. 107
  68. E.F. Schubert, J.E. Cunningham, W.T. Tsang. Appl. Phys. Lett., 51, 817 (1987)
  69. A.V. Dvurechenskii, J.V. Smagina, V.A. Zinovyev, S.A. Teys, A.K. Gutakovskii. Int. J. Nanosci., 3, 19 (2004)
  70. N.P. Stepina, A.V. Dvurechenskii, V.A. Ambrister, J.V. Smagina, V.A. Volodin, A.V. Nenashev, J.P. Leitao, M.C. Carmo, N.A. Sobolev. Thin Sol. Films, 517, 309 (2008)
  71. Zh.V. Smagina, P.L. Novikov, V.A. Zinovyev, V.A. Armbrister, S.A. Teys, A.V. Dvurechenskii. J. Cryst. Growth, 323, 244 (2011)
  72. For a review of QW intermixing, see, e. g., IEEE J. Select. Topics Quant. Electron., 4 (4) (1998), and references therein
  73. N.A. Sobolev, J. Gerster, G. Mauckner, M. Wolpert, W. Limmer, K. Thonke, R. Sauer, H. Presting, U. Konig. Nucl. Instrum. Meth. Phys. Res. B, 136--138, 1057 (1998)
  74. D.J. Paul. Semicond. Sci. Technol., 19, R75 (2004)
  75. N.A. Sobolev, H. Presting, unpublished
  76. M.A.L. Fonseca. PhD thesis (Universidate de Aveiro, 2007).

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