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Diamond-carbide-silicon composite "skeleton" as a promising material for X-ray optical substrates

DOI: 10.21883/TP.2022.08.54572.85-22

Zorina M.V.¹, Mikhailenko M.S.¹, Pestov A.E.¹, Toropov M.N.¹, Chernyshev A.K.¹, Chkhalo N.I.¹, Gordeev S.K.², Vitkin V.V.³

¹Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
²CSRI of materials, St Petersburg, Russia
³ITMO University, St. Petersburg, Russia

Email: aepestov@ipm.sci-nnov.ru

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Abstract
References
Статистика просмотров

The paper proposes the use of diamond-carbide-silicon composite "Skeleton"oledR coated with amorphous silicon as substrates for multilayer X-ray mirrors for powerful synchrotron radiation sources (3+ and 4th generation). The surfaces with the following parameters were obtained using standard deep polishing methods: flatness at the level of RMS_90%=54.2 nm; effective roughness sigma_eff~1.0 nm; high-frequency roughness sigma_2x2~0.1 nm. Keywords: x-ray optics, x-ray mirrors, substrates for x-ray mirrors, roughness.

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