Potapovich N.S.
1, Malevskaya A. V.
1, Soldatenkov F.Yu.
1, Khvostikov V.P.
11Ioffe Institute, St. Petersburg, Russia
Email: nspotapovich@mail.ioffe.ru, amalevskaya@mail.ioffe.ru
The investigations of the influence of the formation modes of contact systems based on Pd-Ge-Au and Au(Ge)-Ni-Au to n-type InGaAsP and NiCr-Ag-Au to p-type InGaAsP and InP on the value of specific contact resistance have been carried out. Low values of specific contact resistance of ~ 10-7 Ω· cm2 were achieved when using the Au(Ge)-Ni-Au contact system (annealing temperature - 420-440oC) and ~ 10-6 Ω· cm2 when deposition of Pd-Ge-Au (at low annealing temperatures <200oC) for n-InGaAsP solid solution compositions with low phosphorus content. For p-InGaAsP samples with a NiCr-Ag-Au contact system, the minimum contact resistance was ~ 10-6 Ω· cm2 at annealing temperatures of 460oC. Keywords: Contact systems, InGaAsP/InP, thermal annealing,heterostructures, photovoltaic cells.
- C.A. Schafer, D. Gray, Acta Astron., 79, 140 (2012). DOI: 10.1016/j.actaastro.2012.04.010
- N.S. Potapovich, M.V. Nakhimovich, V.P. Khvostikov, Semiconductors, 56 (13), 2068 (2022). DOI: 10.21883/SC.2022.13.53907.9688
- X. Jiang, M.A. Itzler, R. Ben-Michael, K. Slomkowski, IEEE J. Sel. Top. Quantum Electron., 13 (4), 895 (2007). DOI: 10.1109/JSTQE.2007.903001
- H.J. Levinson, Principles of lithography, 3rd ed. (SPIE, Washington, 2010), p. 504
- N.A. Kalyuzhnyy, A.V. Malevskaya, S.A. Mintairov, M.A. Mintairov, M.V. Nakhimovich, R.A. Salii, M.Z. Shvarts, V.M. Andreev, Solar Energy Mater. Solar Cells, 262, 112551 (2023). DOI: 10.1016/j.solmat.2023.112551
- A. Zekry, A.Y. Al-Mazroo, IEEE Trans. Electron Dev., 43 (5), 691 (1996). DOI: 10.1109/16.491244
- A.V. Malevskaya, Yu.M. Zadiranov, A.A. Blokhin, V.M. Andreev, Tech. Phys. Lett., 45, 1024 (2019). DOI: 10.1134/S1063785019100262
- P.H. Hao, L.C. Wang, F. Deng, S.S. Lau, J.Y. Cheng, J. Appl. Phys., 79, 4211 (1996). DOI: 10.1063/1.361788
- L.C. Wanga, P.H. Hao, J.Y. Cheng, F. Deng, S.S. Lau, J. Appl. Phys., 79, 4216 (1996). DOI: 10.1063/1.361789
- D.M. Mitin, F.Yu. Soldatenkov, A.M. Mozharov, A.A. Vasil'ev, V.V. Neplokh, I.S. Mukhin, Nanosystems: physics, chemistry, mathematics, 9 (6), 789 (2018). DOI: 10.17586/2220-8054-2018-9-6-789-792
- V.P. Khvostikov, S.V. Sorokina, O.A. Khvostikova, N.Kh. Timoshina, N.S. Potapovich, B.Ya. Ber, D.Yu. Kazantsev, V.M. Andreev, Semiconductors, 47, 307 (2013). DOI: 10.1134/S1063782613020139
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