Shuman V. B.1, Astrov Yu. A.1, Lodygin A. N.1, Portsel L. M.1
1Ioffe Institute, St. Petersburg, Russia
Email: leonid.portsel@mail.ioffe.ru
A method for determining the solubility of magnesium (Mg) in silicon with oxygen content greater than 3·1017 cm-3 is proposed. The method is based on the study the intensity of oxygen absorption band 1106 cm-1 during long-time diffusion annealing of silicon. As a result of optically inactive complex MgO formation, absorption and concentration of O decreases. The difference between O concentration before and after diffusion corresponds to concentration of Mg in the crystal. The Mg solubility in dislociation-free Si at 1250oC equal to (2.5±0.19)·1017 cm-3 is determined. This value coincides with the result obtained earlier by secondary ion mass spectrometry in oxygen-free Si. Keywords: silicon doping, diffusion, impurity centers.
- R.K. Franks, J.B. Robertson. Solid State Commun., 5 (6), 479 (1967)
- L.T. Ho, A.K. Ramdas. Phys. Rev. B, 5 (2), 462 (1972)
- N.V. Abrosimov, N. Notzel, H. Riemann, K. Irmscher, S.G. Pavlov, H.-W. Hubers, U. Bottger, P.M. Haas, N. Drichko, M. Dresse. Solid State Phenomena, 131-133, 589 (2008)
- V.N. Shastin, R.Kh. Zhukavin, K.A. Kovalevsky, V.V. Tsyplenkov, V.V. Rumyantsev, D.V. Shengurov, S.G. Pavlov, V.B. Shuman, L.M. Portsel, A.N. Lodygin, Yu.A. Astrov, N.V. Abrosimov, J.M. Klopf, H.-W. Hubers. FTP, 53 (9), 1263 (2019). (in Russian)
- R.J.S. Abraham, A. DeAbreu, K.J. Morse, V.B. Shuman, L.M. Portsel, A.N. Lodygin, Yu.A. Astrov, N.V. Abrosimov, S.G. Pavlov, H.-W. Hubers, S. Simmons, M.L.W. Thewalt. Phys. Rev. B, 98, 045202 (2018)
- Yu.A. Astrov, L.M. Portsel, V.B. Shuman, A.N. Lodygin, N.V. Abrosimov. Phys. Status Solidi A-Appl. Mat., 219, 2200463 (2022)
- H. Sigmund. J. Electrochem. Soc., 129, 2809 (1982)
- S. Kawanishi, T. Yoshikawa. Mater. Transactions, 58 (3), 450 (2017)
- V.B. Shuman, A.A. Lavrentiev, A.A. Yakovleva, N.V. Abrosimov, A.N. Lodygin, L.M. Portsel, Yu.A. Astrov. FTP, 56 (9), 858 (2022). (in Russian)
- B.N. Rygalin, A.R. Salmanov, V.P. Pelipas, V.K. Prokofieva, V.V. Batavin, E.V. Sokolov. Neorg. mater., 17 (7), 1141 (1981). (in Russian)
- B. Pajot, G. Taravella, J.P. Bouchaud. Appl. Phys. Lett., 23, 189 (1973)
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