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Thermal annealing of multilayer films of diamond-like carbon with a variable content of sp3-phase
Okhapkin A. I.
1, Kraev S. A.1, Yunin P. A.1, Korolyov S. A.1, Radishev D. B.2, Kumar N.3
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
2Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
3Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
3Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Email: poa89@ipmras.ru
The effect of thermal annealing on the phase composition, structural and morphological properties of multilayer films of diamond-like carbon with a variable ratio of sp2/sp3-phases was investigated. It turned out that rapid annealing in argon leads to a loss of the structural periodicity of films and an increase in the content of graphite clusters, along with a decrease of hydrogen. There was also an improvement in the surface morphology of the annealed samples compared to the original film. Keywords: diamond-like carbon, multilayer films, plasma-enhanced chemical vapor deposition, thermal annealing.
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