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High-gradient aspherization of substrates with thin-film Al/Si coatings
Russian version
Durov K. V. 1, Mineev S. M.2, Polkovnikov V. N.1, Chkhalo N. I.1
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
2Lobachevsky State University, Nizhny Novgorod, Russia
Email: zevs2801@mail.ru
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The paper discusses the issues of film aspherization. A multilayer Al/Si structure has been proposed as an aspherizing coating. It was applied to a spherical surface. By selecting the ratio of materials in the period, a state was searched in which stresses in the multilayer structure were minimized. At the same time, the period of the structure of 9-10 nm corresponds to the mirrors of normal incidence for the wavelength range of 17-19 nm, which are of interest to solar astronomy. Using precision shaped diaphragms, an aspherical coating profile with a maximum height difference of ~1.3 μm microns was formed between the magnetron and the substrate. Keywords: thin films, magnetron sputtering, internal stresses, aspherization.
  1. I.I. Sobelman, I.A. Zhitnik, B. Valnichek, M. Rybanski, M. Bernas, S.V. Gaponov, R. Gudets, A.P. Ignatiev, R.V. Isadzhanyan, V.M. Kishchenko, M. Klima, Ya. Kopetski, V.V. Korneev, O.B. Krasnopolsky, M.N. Krmoyan, V.V. Krutov, V.M. Lomkova, A.V. Mitrofanov, S.N. Oparin, R. Persty, A.A. Pertsov, N.N. Salashchenko, V.A. Slemzin, A.B. Telegin, V.O. Timofeev, I.P. Tindo, A.M. Urnov, Yu.N. Fotin, Yu.M. Khojayants. Pisma v AZh, 16 (4), 323 (1990) (in Russian)
  2. I.I. Sobelman, I.A. Zhitnik, A.P. Ignatiev, V.V. Korneev, V.Yu. Klepikov, V.V. Krutov, S.V. Kuzin, A.V. Mitrofanov, S.N. Oparin, A.A. Pertsov, N.N. Salashchenko, V.A. Slemzin, A.I. Stepanov, I.P. Tindo, E.A. Avetisyan, V.M. Lomkova, V.F. Sukhanov, Yu.N. Fotin. Pisma v AZh, 22 (8), 604 (1996) (in Russian)
  3. I.A. Zhitnik, A.P. Ignatiev, V.V. Korneev, V.V. Krutov, S.V. Kuzin, A.V. Mitrofanov, S. Oparin, A.A. Pertzov, V.A. Slemzin, I.P. Tindo, M. Pakhomov, N.N. Salashchenko, O. Timofeev. Proc. SPIE, 3406, 1 (1998)
  4. B.N. Oraevsky, I.I. Sobelman. Pisma v AZh, 28 (6), 34 (2002) (in Russian)
  5. S.V. Kuzin, I.A. Zhitnik, O.I. Bugaenko, A.P. Ignatiev, A.V. Mitrofanov, S.N. Oparin, A.A. Pertsov. Izvestiya RAN. Ser. fiz., 69 (2), 191 (2005) (in Russian)
  6. O.I. Bugaenko, S.V. Kuzin, S.A. Bogachev, I.A. Zhitnik, A.A. Perzov, A.P. Ignatiev, A.M. Mitrofanov, V.A. Slemzin, S.V. Shestov, N.K. Sukhodrev. Adv. Space Res., 43 (6), 1001 (2009)
  7. I.V. Malyshev, D.G. Reunov, N.I. Chkhalo, M.N. Toropov, A.E. Pestov, V.N. Polkovnikov, N.N. Tsybin, A.Ya. Lopatin, A.K. Chernyshev, M.S. Mikhailenko, R.M. Smertin, R.S. Pleshkov, O.M. Shirokova. Optics Express, 30 (26), 47567 (2022)
  8. J.-P. Delaboudiniere, R.A. Stern, A. Maucherat, F. Portier-Fozzani, W.M. Neupert, J.B. Gurman, R.C. Catura, J.R. Lemen, L. Shing, G.E. Artzner, J. Brunaud, A.H. Gabriel, D.J. Michels, J.D. Moses, B. Au, K.P. Dere, R.A. Howard, R. Kreplin, J.M. Defise, C. Jamar, P. Rochus, J.P. Chauvineau, J.P. Marioge, F. Clette, P. Cugnon, E.L. van Dessel. Adv. Space Res., 20 (12), 2231 (1997)
  9. N.I. Chkhalo, M.S. Mikhailenko, A.E. Pestov, V.N. Polkovnikov, M.V. Zorina, S.Yu. Zuev, D.S. Kazakov, A.V. Milkov, I.L. Strulya, V.A. Filichkina, A.S. Kozlov. Appl. Opt., 58, 3652 (2019)
  10. S.S. Andreev, S.Yu. Zuev, V.I. Pozdnyakova, N.N. Salashchenko, V.A. Slemzin, I.L. Strulya, I.A. Shereshevsky, I.A. Zhitnik. Poverkhnost. Rentgenovskie, sinkhrotronnye i neytronnye issledovaniya 1, 6 (2003) (in Russian)
  11. S.S. Andreev, E.B. Klyuenkov, A.L. Mizinov, V.N. Polkovnikov, N.N. Salashchenko, L.A. Suslov, V.V. Chernov. Poverkhnost. Rentgenovskie, sinkhrotronnye i neytronnye issledovaniya 2, 45 (2005) (in Russian)
  12. S.S. Andreev, S.V. Gaponov, S.A. Gusev, S.Yu. Zuev, E.B. Klyuenkov, K.A. Prokhorov, N.I. Polushkin, E.N. Sadova, N.N. Salashchenko, L.A. Suslov, M.N. Haidl. Poverkhnost. Rentgenovskie, sinkhrotronnye i neytronnye issledovaniya 1, 66 (2001) (in Russian).
  13. S.A. Bogachev, N.I. Chkhalo, S.V. Kuzin, D.E. Pariev, V.N. Polkovnikov, N.N. Salashchenko, S.V. Shestov, S.Y. Zuev. Appl. Opt., 55 (9), 2126 (2016)
  14. I.G. Zabrodin, B.A. Zakalov, I.A. Kaskov, E.B. Klyuenkov, V.N. Polkovnikov, N.N. Salashchenko, S.D. Starikov, L.A. Suslov. Poverkhnost. Rentgenovskie, sinkhrotronnye i neytronnye issledovaniya, (in Russian). 7, 37 (2013)
  15. M. Svechnikov. J. Appl. Crystallogr., 53 (1), 253 (2020)
  16. A. Brenner, S. Senderoff. J. Res. Nat'l. Bur. Stand, 42, 105 (1949)
  17. l. Maissel, R. Glang. Tekhnologiya tonkih plenok. Spravochnik (Sovetskoe radio, M., 1977) (in Russian)
  18. R.M. Smertin. Thin Solid Films, 782 (1), 140044 (2023)
  19. N.I. Chkhalo, N.N. Salashchenko, M.V. Zorina. Review Scientific Instruments, 86, 016102 (2015)
  20. A.A. Akhsakhalyan, N.I. Chkhalo, N. Kumar, I.V. Malyshev, A.E. Pestov, N.N. Salashchenko, M.N. Toropov, B.A. Ulasevich, S.V. Kuzin. Precision Eng., 71, 330 (2021).

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