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Correlative extreme ultraviolet, ultraviolet and optical microscopy based on a specular microscope with axial tomography
Russian version
I. V. Malyshev1, Reunov D.G.1, N. I. Chkhalo 1, M. N. Toropov1, Pestov A.E.1, Polkovnikov V. N.1, Chernyshov A.K.1, Pleshkov P.C.1, Kazakov E.P.2,3, Lavrushkina C.V.2, Golyshev С.A.2, Pospelov A.D. 4, Shirokova O.M.
1Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
2A.N. Belozersky Scientific Research Institute of Physico-Chemical Biology, Lomonosov Moscow State University, Moscow, Russia
3Faculty of Biology, Lomonosov Moscow State University, Moscow, Russia
4Lobachevsky State University, Nizhny Novgorod, Russia
Email: reunov_dima@ipmras.ru
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The work is devoted to the use of a mirror extreme ultraviolet microscope with a magnification of 46 times and a resolution of up to 140 nm for studying samples at three wavelengths: 13.84 nm, 200 nm and 535 nm is considered. The ability to see one area of a sample at different wavelengths provides additional information about its structure. The choice of wavelength occurs by changing sources: LED or gas laser-plasma source, as well as input-output of a multilayer filter that cuts off everything except 13.84 nm. For three-dimensional reconstruction, the sample was scanned along the optical axis using a piezo actuator. In reconstructing images from tomographic data, a point spread function is used, modeled on the basis of aberrations measured on an interferometer. Keywords: extreme ultraviolet microscopy, ultraviolet microscopy, axial tomography, electron microscopy, soft x-ray microscopy.
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