Physics of the Solid State
Interface doping of zinc oxide nanorods
Ryabko A. A.
1, Mazing D.S.
2, Bobkov A. A.
2, Maximov A. I.
2, Levitskii V. S.
1, Lazneva E. F.
3, Komolov A. S.
3, Moshnikov V. A.
2, Terukov E. I.
1
1Ioffe Institute, St. Petersburg, Russia
2St. Petersburg State Electrotechnical University “LETI", St. Petersburg, Russia
3St. Petersburg State University, St. Petersburg, Russia
2St. Petersburg State Electrotechnical University “LETI", St. Petersburg, Russia
3St. Petersburg State University, St. Petersburg, Russia
Email: a.a.ryabko93@yandex.ru, dmazing@yandex.ru, darklord125@mail.ru, aimaximov@mail.ru, lev-vladimir@yandex.ru, akomolov07@yandex.ru, vamoshnikov@mail.ru
The effect of an increase in the electrical conductivity of a system of zinc oxide nanorods by a factor of 105 during atomic layer deposition of a thin dielectric layer of aluminum oxide was found. It is shown that a change in the electrical conductivity of zinc oxide during atomic layer deposition of aluminum oxide on the surface is also observed for thin polycrystalline layers of zinc oxide. A study of polycrystalline layers of zinc oxide coated with aluminum oxide using ultraviolet and X-ray photoelectron spectroscopy is presented. Based on the results of photoelectron spectroscopy, two main factors for changing the electrical conductivity are proposed, which consist in the formation of a two-dimensional electron gas at the ZnO|Al2O3 interface and doping of the near-surface region of zinc oxide with aluminum atoms. Keywords: nanorods, zinc oxide, aluminum oxide, atomic layer deposition, transparent electrodes, X-ray photoelectron spectroscopy, ultraviolet photoelectron spectroscopy.
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