Thermochemical polishing of single-crystal HPHT-diamond substrates: surface analysis
Irzhevsky K.A.1,2, Klepikov I.V.1,2,3, Kolyadin A.V.4, Patrenin Y.V.3, Zhiltsov M.A.5, Shepelev V.A.2, Altukhov A.A.2
1St. Petersburg State University, St. Petersburg, Russia
2Russian Technological University, Moscow Institute of Radio Engineering, Electronics, and Automation, Moscow, Russia
3LLC "NPK Almaz", Saint Petersburg, Russia
4LLC "NPK Almaz-Karabanovo", 197706, Karabanovo, Russia
5 LLC "KRISTALIN", Barnaul, Russia
Email: Kirillirjevskii01@mail.ru
The results of single-crystal HPHT-diamond substrates treatment with the method of thermochemical polishing were analyzed. The main application of this method is - bringing the surface of the mechanically polished diamond substrates to the condition close to atomically smooth one. Using the method of optical profilometry, for the first time the results of the studies of the entire surface area (4x4 mm) of high-quality diamond substrates were obtained. It was shown that thermochemical polishing may considerably improve the morphological characteristics of diamond substrates up to the point that at 80-90 % of their surface area the height differences will make less than 200 nm. The data obtained using the atomic-force microscopy method confirm the reduction in the surface roughness to the level of Ra (0.5-0.7) nm. The polishing process also leads to formation of cavities of various size and depth, distributed unevenly; as the homogeneity of the surface increases, their number may rise. The study results demonstrate the significant prospects of thermochemical polishing of diamond substrates for their industrial use in high-tech areas of microelectronics and micromechanincs requiring flat surfaces with minimum roughness. Keywords: HPHT-diamond, thermochemical polishing, mechanical polishing, surface roughness, planarity.
- Umezawa Hitoshi, Ikeda Kazuhiro, Kumaresan Ramanujam, Tatsumi Natsuo, Shikata Shin Ichi. IEEE Electron Device Lett., 30, 960 (2009). DOI: 10.1109/ LED.2009.2026439
- Matsumoto Tsubasa, Yamakawa Tomoya, Kato Hiromitsu, Makino Toshiharu, Ogura Masahiko, Zhang Xufang, Inokuma Takao, Yamasaki Satoshi, Tokuda Norio. Appl. Phys. Lett., 119 (12), 242105 (2021). DOI: 10.1063/5.0075964
- R.S. Sussmann, C.S.J. Pickles, J.R. Brandon, J.H. Wort, S.E. Coe, A. Wasenczuk, C.N. Dodge, A.C. Beale, A.J. Krehan, P. Dor, A. Nucara, P. Calvani. Nouv. Cim. D., 20, 503 (1998). DOI: 10.1007/BF03185545
- Y. Shvydko. X-ray optics high energy resolution applications (Springer, Berlin, 2004)
- C.S. Bodie, G. Lioliou, G. Lefeuvre, A.M. Barnett. Nucl. Instrum. Methods Phys. Res., Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 989, 164950 (2021). DOI: 10.1016/j.nima.2020.164950
- C.S. Bodie, G. Lioliou, G. Lefeuvre, A.M. Barnett. Appl. Radiat. Isotopes, 180, 110027 (2022). DOI: 10.1016/j.apradiso.2021.110027
- C.S. Bodie, G. Lioliou, M.D.C. Whitaker, A.M. Barnett. Nucl. Instrum. Methods Phys. Res. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1058, 168882 (2024). DOI: 10.1016/j.nima.2023.168882
- A. Kolyadin, V. Luchinin, Yu. Yagudaev, O. Bokhov, S. Ilin, I. Klepikov, A. Nozhkina. Elektronika: nauka, tekhnologiya, biznes (in Russian). 5, 00216 (2022). DOI: 10.22184/1992-4178.2022.216.5.50.61
- Luo Hu, Ajmal Khan Muhammad, Liu Wang, Yamamura Kazuya, Deng Hui. Intern. J. Extreme Manufacturing, 3 (2), 022003 (2021). DOI: 10.1088/2631-7990/abe915
- Schuelke Thomas, A. Grotjohn Timothy. Diamond and Related Mater., 32, 17 (2013). DOI: 10.1016/j.diamond.2012.11.007
- P. Grodzinski. Diamond technology: production methods for diamond and gem stones (N.A.G. Press, London, 1953)
- Tokura Hitoshi, Yang Cheng-Feng, Yoshikawa Masanori. Thin Solid Films, 212 (1), 49 (1992). DOI: 10.1016/0040-6090(92)90499-2
- A.D. Weima Jeffrey, R. Fahrner Wolfgang, Job Reinhart. J. Solid State Electrochem., 5, 112 (2001). DOI: 10.1007/S100080000118
- A.M. Zaitsev, G. Kosaca, B. Richarz, V. Raiko, R. Job, T. Fries, W.R. Fahrner. Diamond and Related Mater., 7 (8), 1108 (1998). DOI: 10.1016/S0925-9635(98)00158-7
- A.A. Altukhov, A.V. Mitenkin, T.B. Teplov, M.A. Doronin. Nauchny vestnik Moskovskogo gos. gornogo un-ta, 7, 3 (2013) (in Russian)
- Sung Chien-Min, Tai Ming-Fong. Intern. J. Refractory Metals and Hard Mater., 15 (4), 237 (1997). DOI: 10.1016/S0263-4368(97)00003-6
- A.P. Malshe, B.S. Park, W.D. Brown, H.A. Naseem. Diamond and Related Mater., 8 (7), 1198 (1999). DOI: 10.1016/S0263-4368(97)00003-6
- Sakauchi Kazuto, Nagai Masatsugu, Tabakoya Taira, Yuto Nakamura, Satoshi Yamasaki, C.E. Nebel, Xufang Zhang, Tsubasa Matsumoto, Takao Inokuma, Norio Tokuda. Diamond and Related Mater., 116, 108390 (2021). DOI: 10.1016/j.diamond.2021.108390
- C.F. Hickey, T.P. Thorpe, A.A. Morrish, J.E. Butler, C. Vold, K.A. Snail. SPIE, 1534, 67 (1991). DOI: 10.1117/12.48281
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