Surface Analysis of Polycrystalline CVD- Diamond after Static Thermochemical Treatment
Lebedenko A.V. 1,2, Klepikov I.V. 1,2,3, Kulikov E.N.4, Deryabkin A.V.4, Fedorov Y.Y.4, Shepelev V.A.2, Altukhov A.A.2
1St. Petersburg State University, St. Petersburg, Russia
2Russian Technological University, Moscow Institute of Radio Engineering, Electronics, and Automation, Moscow, Russia
3LLC "NPK Almaz", Sestroretsk, Russia
4 JSC "Research and Production Enterprise Istok named after Shokin", Fryazino, Russia
Email: a.lebedenko@spbu.ru, klepikov_igor@mail.ru, istok220@mail.ru, valq2006@rambler.ru, altuhov_a@mirea.ru

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This paper presents a comprehensive surface analysis of polycrystalline CVD-diamond after static thermochemical treatment (TCT). The study focuses on subtle changes in the morphology and surface roughness of the diamond before and after TCT. Optical, atomic force, and scanning electron microscopy methods were used to conduct the analysis, allowing for detailed characterization of both macroscopic and microscopic changes. The results show a reduction in surface roughness parameters, significant changes in surface relief and textures, indicating the effectiveness of TCT for such a complex material as polycrystalline diamond. Keywords: CVD- diamond, polycrystalline diamond, polycrystal, surface roughness, thermochemical treatment method, thermochemical treatment.
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