In this paper, the characteristics of a multilayer NiMo/C system, promising for Gebel-type mirrors, are investigated. The structures were synthesized by reactive magnetron sputtering in argon with pulsed nitrogen supply, the percentage of which in the chamber was equal to 15 % and 30 % of the total pressure of the working gas. The periods of multilayer structures 41.5 and 33.5 Angstrem are calculated based on the actual systems of collimation and focusing of hard X-ray radiation in diffractometers of the DRON type (St. Petersburg). The effect of annealing at maximum temperatures of 250 ^oC and 320 ^oC on the reflective and structural properties of multilayer NiMo/C structures was studied. Based on the results of small-angle X-ray reflectometry at a wavelength of 0.154 nm, the structural parameters of NiMo/C were determined. It is shown that the values of the transition regions on the C and NiMo layers are in the range of 4-7 Angstrem and generally tend to decrease or fluctuate slightly after annealing. After annealing, the NiMo/C samples synthesized with a nitrogen content of 15 % had reflection coefficients in the first order of 78.8 %-76.1 % for periods 41.5-33.5 Angstrem respectively. For structures synthesized with 30 % nitrogen content, 81.4 %-77.4 %. The high reflectivity of the multilayer NiMo/C structures allowed us to assert that it is a good alternative to the Gebel-type mirrors based on a pair of W/Si materials widely used in technology. Keywords: multilayer X-ray mirrors, reactive magnetron sputtering, Gebel type mirrors. XXIX Symposium Nanophysics and Nanoelectronics", Nizhny Novgorod, March 10-14, 2025 XXIX Symposium Nanophysics and Nanoelectronics", Nizhny Novgorod, March 10-14, 2025

Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.

Дата начала обработки статистических данных - 27 января 2016 г.