Porous germanium films were produced by selective removal of the GeO₂ matrix from the GeO₂<Ge-NCs> heterolayer in deionized water or HF. On the basis of Raman and infrared spectroscopy data it was suppose <Ge-NCs> heterolayers. The kinetics of air oxidation of amorphous porous Ge layers was investigated by scanning ellipsometry. Spectral ellipsometry allowed estimating the porosity of amorphous and crystalline porous Ge layers,which was ~70% and ~80%, respectively. Acknowledgement Ellipsometry and Raman measurements were funded by the Russian Foundation for Basic Research (project No 16-07-00975). SEM and IR spectroscopy investigations were carried out with the financial support of the Russian Science Foundation (project No 14-22-00143).

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