Vanadium dioxide (VO₂) undergoes a reversible metal-insulator transition at low temperature, which has wide range of applications in smart windows and infrared detectors. However, the preparation of VO₂ films with controllable phase on glass substrate is still limited. In this paper, it is shown that B-phase can be transformed into M-phase with monoclinic structure by inserting TiO₂ buffer layer on glass substrate at low temperature of 400^oC. This crystalline transformation might be attributed to that Ti atoms diffuse and form oxygen deficient environments. Different thicknesses of buffer layers have different effect on characteristic of VO₂ film. With 50 nm TiO₂ buffer layer, the VO₂/TiO₂/glass film showed an abrupt resistance change with more than 2.5-order of magnitude across metal-insulator transition, and the visible-light transmittance value is as high as 55.5% with the solar modulation capability up to 8.6%. The current results are very important for the application in smart windows. Keywords: vanadium dioxide, TiO₂ buffer layer, metal-insulator transition, solar modulation capability.

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Дата начала обработки статистических данных - 27 января 2016 г.