Effects of high-temperature AlN buffer on the microstructure of AlGaN/GaN HEMTs
Corekci S.1, Ozturk M.K.2, Yu Hongbo3, Cakmak M.2, Ozcelik S.2, Ozbay E.4
1Department of Physics, Kirklareli University, Kirklareli, Turkey
2Department of Physics, Gazi University, Ankara, Turkey
3Nanotechnology Research Center, Bilkent University, Ankara, Turkey
4Nanotechnology Research Center, Department of Physics, Department of Electrical and Electronics Engineering, Bilkent University, Ankara, Turkey
Выставление онлайн: 20 мая 2013 г.
Effects on AlGaN/GaN high-electron-mobility transistor structure of a high-temperature AlN buffer on sapphire substrate have been studied by high-resolution x-ray diffraction and atomic force microscopy techniques. The buffer improves the microstructural quality of GaN epilayer and reduces approximately one order of magnitude the edge-type threading dislocation density. As expected, the buffer also leads an atomically flat surface with a low root-mean-square of 0.25 nm and a step termination density in the range of 108 cm-2. Due to the high-temperature buffer layer, no change on the strain character of the GaN and AlGaN epitaxial layers has been observed. Both epilayers exhibit compressive strain in parallel to the growth direction and tensile strain in perpendicular to the growth direction. However, an high-temperature AlN buffer layer on sapphire substrate in the HEMT structure reduces the tensile stress in the AlGaN layer.
- U.K. Mishra, Y.-F. Wu, B.P. Keller, S. Keller, S.P. Denbaars. IEEE Trans. Microwave Theory and Tehcniques, 46, 756 (1998)
- Y.-F. Wu, D. Kapolnek, J.P. Ibbetson, P. Parikh, B.P. Keller, U.K. Mishra. IEEE Trans. Electron. Dev., 48, 586 (2001)
- L. Shen, S. Heikman, B. Moran, R. Coffie, N.-Q. Zhang, D. Buttari, I.P. Smorchkova, S. Keller, S.P. DenBaars, U.K. Mishra. IEEE Electron. Dev. Lett., 22, 457 (2001)
- M. Umeno, T. Egawa, H. Ishikawa. Mater. Sci. Semcond. Proc., 4, 459 (2001)
- H. Jiang, T. Egawa, M. Hao, Y. Liu. Appl. Phys. Lett., 87, 241 911 (2005)
- X.L. Fang, Y.Q. Wang, H. Meidia, S. Mahajan. Appl. Phys. Lett., 84, 484 (2004)
- C.W. Kuo, Y.K. Fu, C.H. Kuo, L.C. Chang, C.J. Tun, C.J. Pan, G.C. Chi. J. Cryst. Growth, 311, 249 (2009)
- J.-S. Ha, H.-J. Lee, S.W. Lee, H.J. Lee, S.H. Lee, H. Goto, M.W. Cho, T. Yao, S.-K. Hong, R. Toba, J.W. Lee, J.Y. Lee. Appl. Phys. Lett., 92, 091 906 (2008)
- Q.M. Fu, T. Peng, F. Mei, Y. Pan, L. Liao, C. Liu. J. Phys. D: Appl. Phys., 42, 035 311 (2009)
- S. Corek ci, M.K. Ozturk, A. Bengi, M. Cakmak, S. Oz celik, E. Ozbay. J. Mater Sci., 46, 1606 (2011)
- Z. Chen, Y. Pei, S. Newman, R. Chu, D. Brown, R. Chung, S. Keller, S.P. DenBaars, S. Nakamura, U.K. Mishra. Appl. Phys. Lett., 94, 112 108 (2009)
- S.M. Hubbard, G. Zhao, D. Pavlidis, W. Sutton, E. Cho. J. Cryst. Growth, 284, 297 (2005)
- S. Heikman, S. Keller, S.P. DenBaars, U.K. Mishra. Appl. Phys. Lett., 81, 439 (2002)
- Z. Bougrioua, I. Moerman, L. Nistor, B. Van Daele, E. Monroy, T. Palacios, F. Calle, M. Leroux. Phys. Status Solidi A, 195, 93 (2003)
- H. Yu, D. Cali skan, E. Ozbay. J. Appl. Phys., 100, 033 501 (2006)
- M. Miyoshi, H. Ishikawa, T. Egawa, K. Asai, M. Mouri, T. Shibata, M. Tanaka, O. Oda. Appl. Phys. Lett., 85, 1710 (2004)
- B. Poti, M.A. Tagliente, A. Passaseo. J. Non-Cryst. Sol., 352, 2332 (2006)
- S. Corek ci, M.K. Ozturk, B. Akaov glu, M. Cakmak, S. Oz celik, E. Ozbay, J. Appl. Phys., 101, 123 502 (2007)
- D. Kapolnek, X.H. Wu, B. Heying, S. Keller, B.P. Keller, U.K. Mishra, S.P. DenBaars, J.S. Speck. Appl. Phys. Lett., 67, 1541 (1995)
- V.V. Mamutin, V.A. Vekshin, V.Yu. Davydov, V.V. Ratnikov, A.Yu. Kudriavtsev, B. Ya. Ber, V.V. Emtsev, S.V. Ivanov. Phys. Status Solidi A, 176, 373 (1999)
- V. Tasco, A. Campa, I. Tarantini, A. Passaseo, F. Gonzalez-Posada, A. Redondo-Cubero, K. Lorenz, N. Franco, E. Munoz. J. Appl. Phys., 105, 063 510 (2009)
- M.E. Vickers, M.J. Kappers, R. Datta, C. McAleese, T.M. Smeeton, F.D.G. Rayment, C.J. Humphreys. J. Phys. D: Appl. Phys., 38, A99-A104 (2005)
- H. Jiang, T. Egawa, M. Hao, Y. Liu. Appl. Phys. Lett., 87, 241 911 (2005)
- S. Arulkumaran, T. Egawa, H. Ishikawa, T. Jimbo. Appl. Phys. Lett., 81, 3073 (2002)
- C.G. Dunn, E.F. Koch. Acta Metall. 5, 548 (1957)
- L. Sugiura. J. Appl. Phys., 81, 1633 (1997)
- D.C. Look, J.R. Sizelove. Phys. Rev. Lett., 82, 1237 (1999)
- P. Fini, X. Wu, E.J. Tarsa, Y. Golan, V. Srikant, S. Keller, S.P. Denbaars, J.S. Speck. Jpn. J. Appl. Phys., 37, 4460 (1998)
- W. Qian, M. Skowronski, M. De Graef, K. Doverspike, L.B. Rowland, D. Gaskill. Appl. Phys. Lett., 66, 1252 (1995)
- F.J. Xu, J. Xu, B. Shen, Z.L. Miao, S. Huang, L. Lu, Z.J. Yang, Z.X. Qin, G.Y. Zhang. Thin Sol. Films, 517, 588 (2008)
- V. Darakchieva, B. Monemar, A. Usui. Appl. Phys. Lett., 91, 031 911 (2007)
- R. Chierchia, T. Bottcher, H. Heinke, S. Einfeldt, S. Figge, D. Hommel. J. Appl. Phys., 93, 8919 (2003)
- C. Kisielowski, J. Kruger, S. Ruvimov, T. Suski, J.W. Ager III, E. Jones, Z. Liliental-Weber, M. Rubin, E.R. Weber, M.D. Bremser, R.F. Davis. Phys. Rev. B, 54, 17 745 (1996)
- S. Hearne, E. Chson, J. Han, J.A. Floro, J. Fiegel, J. Hunter, H. Amano, I.S.T. Tsong. Appl. Phys. Lett., 74, 356 (1999)
- V.S. Harutyunyan, A.P. Aivazyan, E.R. Weber, Y. Kim, Y. Park, S.G. Subramanya. J. Phys. D: Appl. Phys., 34, A35--A39 (2001)
- W.D. Nix, B.M. Clemens. J. Mater. Res., 14, 3467 (1999)
- R. Chierchia. Strain and crystalline defects in epitaxial GaN layers studied by high-resolution X-ray diffraction (Bremen. 2007)
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